Vacuum Systems Engineer
ASML
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Market check
How this pay compares to similar roles
This role pays less than 78% of similar roles. Most pay $131,250–$191,000 — the blue band above. At the midpoint, this role pays about $126k versus about $161k for comparable roles.
Based on 240 similar postings.
Employer
ASML is a leading supplier of lithography equipment, used by the world’s top chipmakers to print microchips that are increasingly powerful, fast and energy efficient.
ASML currently has 49 open roles on FindRole.
Listed pay typically runs $118,800–$173,500 across 44 roles with salary data.
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At a glance
The Vacuum System Engineer joins the Defectivity Module Delivery Unit within the Development and Engineering sector. This role focuses on creating contamination-free vacuum environments for advanced Extreme Ultraviolet lithography machines. You will model and design gas flows from atmosphere to deep vacuum, select appropriate materials, and design cleanliness processes to support vacuum-grade performance in scanner and test-rig environments. Key responsibilities include specifying vacuum components, defining pump-down and vent procedures, and executing qualification tests or designs of experiments for degassing chambers. You will utilize skills in vacuum systems, gas-flow architecture, molecular cleanliness, and particle transport. The role requires performing pressure-drop and flow budgeting calculations while troubleshooting surface particulate issues. You will collaborate with architects and research partners to ensure high wafer yield and machine availability in semiconductor manufacturing.
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