Vacuum Systems Engineer

ASML

Confirmed live yesterday High trust

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Work type
On-site
Location
Wilton, CT
Posted
4 days ago
Freshness
Confirmed live yesterday

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Similar $162k
$123k most similar roles pay here $202k

This listing doesn't post a salary. Most similar roles pay $130,987–$193,000.

Based on 240 similar postings.

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About ASML

ASML is a leading supplier of lithography equipment, used by the world’s top chipmakers to print microchips that are increasingly powerful, fast and energy efficient.

ASML currently has 63 open roles on FindRole.

Listed pay typically runs $117,750–$176,625 across 31 roles with salary data.

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TL;DR · Vacuum Systems Engineer

As a Vaccum Systems Engineer within the Defectivity Module Delivery Unit, you will join the Development and Engineering sector to ensure critical environment integrity for advanced Extreme Ultraviolet lithography machines. You will be responsible for modeling and designing gas flow from atmosphere to deep vacuum, selecting appropriate materials, and developing cleanliness processes to maintain contamination-free environments in scanner and test-rig systems. Your daily work involves specifying vacuum components, performing pressure-drop and flow budgeting calculations, executing designs of experiments for degassing chambers, and conducting qualification tests to verify system performance. You will utilize expertise in gas-flow architecture, particle transport, and vacuum measurement techniques like RGA. The role addresses the technical challenge of maintaining molecular and particle cleanliness within high-precision semiconductor manufacturing equipment, directly impacting wafer yield and machine availability through rigorous engineering analysis and documentation.

What you'll do

  • Model and design gas flow architectures from atmosphere to deep vacuum for EUV lithography machines.
  • Select appropriate materials and design cleanliness processes to ensure vacuum-grade performance.
  • Specify vacuum system components, standards, and procedures within Technical Product Documentation.
  • Define and execute qualification tests to verify that subsystems meet all performance and design requirements.
  • Analyze and resolve particle contamination issues through the specification of flushing and venting procedures.
  • Perform calculations for pressure-drop budgeting, flow budgeting, humidification, and gas purity.
  • Execute designs of experiments (DOEs) for degassing chambers and components at product and process levels.
  • Lead the local engineer guild to provide expertise on machine conditioning and vacuum systems.

What we're looking for

  • A bachelor's degree in a relevant technical field is required.
  • A master's degree or PhD is preferred depending on role scope and technical depth.
  • Candidates must be legally authorized to access controlled technology under U.S. Export Administration Regulations.
  • Experience with vacuum and gas-flow phenomena and applications, preferably in the semiconductor industry, is prioritized.
  • Knowledge of molecular/particle cleanliness, material compatibility, and contamination troubleshooting is required.
  • Ability to perform pressure-drop and flow budgeting, execute DOEs, and analyze measurement results is required.
  • Proficiency in technical writing and documentation of standards, procedures, and requirements is required.
  • Experience with modeling tools for gas flow or vacuum performance and advanced physics concepts like plasma or rarefied gas flow are preferred.

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